You can set it to high accuracy (0.001 MPa) sensitivity to 0.001 MPa (0.001 MPa) of sensitivity, such as liquid crystal and semiconductor related processes, including the carrier gas pressure control in pure water circuits.
Contamination managed manufacturing process.
The main valve part uses a unique balance structure.
Always-bleed type but low consumption flow rate {2R/min (ANR)} ● Push-lock mechanism is adopted for the pressure control handle.
The contact part uses SUS316 and fluorine rubber.
Pressure gauge option settings.